CCT MALAYSIATokyo Electron TEL P8 / P8XL / P12 — parts & repair
Z-axis motor driver
Part No. D3022
P8P8XLMotionTEL
In stock — 3 units available
- Compatible models
- TEL P8 / P8XL
- Category
- Motion
- Alt / cross-ref
- D3020
- Vendor
- TEL
Z-axis driver, revisions D3020 and D3022 functionally identical for P8 / P8XL service.
Z 轴驱动器，D3020 与 D3022 修订版于 P8 / P8XL 上功能完全相容。