SMC THERMO-CON temperature control unit — Tokyo Electron (TEL) Mark V / VZ part THERMO-CON 97A

Part no.料号: THERMO-CON 97A
Vendor厂牌: SMC
Compatible适用机型: Tokyo Electron (TEL) Mark V / VZ
Category分类: Thermal温控

THERMO-CON 97A On lead time (~14 days)备货（约 14 天） Send-in repair also available也接受寄修

SMC THERMO-CON temperature control unit — THERMO-CON 97ASMC THERMO-CON 温控主机 — THERMO-CON 97A

Name: SMC THERMO-CON temperature control unit
Brand: SMC
SKU: THERMO-CON 97A

Mark VMark VZSMC

About this part零件说明

SMC circulating-fluid temperature controller for chuck / optics thermal regulation. Available in 97A / 97B / 200A / 200B / 203A / 203B — confirm model at order.

SMC 循环液温控机，用于吸盘 / 光学系统恒温调节。型号含 97A / 97B / 200A / 200B / 203A / 203B，下单时请确认。

Repair维修

Yours already failed? We repair this one at component level — send it in, we diagnose it and verify the fix on a live machine. Usually faster than sourcing a replacement.

手上那颗已经坏了？这颗我们做板级维修 —— 寄给我们，诊断后在实机上验证修复，通常比重新找一颗新的快。

Alternate numbers替代料号

THERMO-CON 97BTHERMO-CON 200ATHERMO-CON 200BTHERMO-CON 203ATHERMO-CON 203B

WhatsApp us about this part用 WhatsApp 询问这个料号 See what we repair查看可维修的板卡

Send the part number or a photo of the nameplate and we can quote. CCT Malaysia, in this business since 2006.把料号或铭牌照片传给我们就能报价。CCT Malaysia，自 2006 年起从事这一行。

Need a part that isn't listed? This catalogue isn't everything we handle — ask us on WhatsApp and we'll check.需要的料号这里没有？目录上列的不是全部 —— 用 WhatsApp 问我们，我们帮你查。